Abstract
Cantilevers are one of the most utilized mechanical elements for acoustic sensing. In comparison to the edge clamped diaphragms of different shapes, a single edge clamped cantilever makes an acoustic sensor mechanically sensitive for detection of lower pressure. The aspect ratio of cantilevers is one of the most important parameters which affect sensitivity. Herein, we present a mathematical, finite element method and experimental analysis to determine the effect of the aspect ratio on the resonant frequency, response time, mechanical sensitivity, and capacitive sensitivity of a cantilever-based acoustic pressure sensor. Three cantilevers of different aspect ratios (0.67, 1, and 1.5) have been chosen for sound pressure application to detect capacitance change. The cantilever with the smallest aspect ratio (0.67) has the highest response time (206 ms), mechanical sensitivity, and capacitive sensitivity (22 fF), which …